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Founded in 2011 and located in Wuxi National Hi-tech District—China’s hub for IoT innovation—MemsTech is enterprise specializing in the R&D, production, and sales of MEMS pressure sensors.Our sensor products are widely used in medical, automotive, and consumer electronics sectors. With professional development, scientific production management, rigorous packaging and testing, and competitive pricing, we consistently deliver high-performance, cost-effective sensing solutions.
1. General specifications
Table 1. Limit parameters
| Characteristic | Symbol | Min | Typ | Max | Unit |
| Min pressure offset (0℃ to 85℃) | Voff | 0.055 | 0.1 | 0.145 | VDC |
| Full-scale output (0℃ to 85℃) | VFSO | 3.055 | 3.1 | 3.145 | VDC |
| Full-scale span (0℃ to 85℃) | VFSS | 2.91 | 3 | 3.09 | VDC |
Table 2. Type of pressure
| Type of pressure | description |
| Absolute | The output is proportional to the difference between the applied pressure and the built-in reference vacuum |
| Gauge pressure | The output is proportional to the difference between the applied pressure and the atmospheric (ambient) pressure |
| Differential pressure | The output is proportional to the difference between the pressure applied to each port (port 1 – port 2). |
2. The analog output technical parameters
Table 3. Analog output specifications
(VS = 5.0 Vdc, TA = 25 °C unless otherwise noted. )
| Characteristic | Symbol | Min | Typ | Max | Unit |
| Pressure range(1) | POP | 0 | — | 100 | kPa |
| 15 | — | 115 | |||
| Supply voltage(2) | VS | 4.75 | 5 | 5.25 | VDC |
| Supply current | IO | — | 7 | 10 | mAdc |
| Minimum pressure offset(3), (0 to 85 °C) @ VS = 5.0 V |
VOFF | 0.088 | 0.2 | 0.313 | VDC |
| Full-scale output(4), differential and absolute (0 to 85 °C) @ VS = 5.0 V |
VFSO | 4.587 | 4.7 | 4.813 | VDC |
| Full-scale Span(5), differential and absolute (0 to 85 °C) @ VS = 5.0 V |
VFSS | — | 4.5 | — | VDC |
| Accuracy(6) | — | — | — | ±2.5 | %VFSS |
| Sensitivity | V/P | — | 45 | — | mV/kPa |
| Response time(7) | tR | — | 1 | — | ms |
| Output source current at full-scale output | IO+ | — | 0.1 | — | mAdc |
| Warm-up time(8) | — | — | 20 | — | ms |
| Offset stability(9) | — | — | ±0.5 | — | %VFSS |
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range.
3. Offset (VOFF) is defined as the output voltage at the minimum rated pressure.
4. Full-scale output (VFSO) is defined as the output voltage at the maximum or full-rated pressure.
5. Full-scale span (VFSS) is defined as the algebraic difference between the output voltage at full-rated pressure and the output voltage at the minimum rated pressure.
6. Accuracy (error budget) consists of the following:
Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range.
Temperature hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied.
Pressure hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum or maximum rated pressure at 25 °C.
TcSpan: Output deviation over the temperature range of 0 to 85 °C, relative to 25 °C.
TcOffset: Output deviation with minimum pressure applied over the temperature range of 0 to 85 °C, relative to 25 °C.
Variation from nominal: The variation from nominal values, for offset or full-scale span, as a percent of VFSS at 25 °C.
7. Response time is defined as the time for the incremental changed in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure.
8. Warm-up time is defined as the time required for the product to meet the specified output voltage after the pressure has been stabilized.
9. Offset stability is the product’s output deviation when subjected to 1000 hours of pulsed pressure, temperature cycling with bias test.
